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Prof. Stephen D Senturia

Professor of Electrical Engineering, Emeritus

Primary DLC

Department of Electrical Engineering and Computer Science

MIT Room: 38-344C
(617) 253-6869

Areas of Interest and Expertise

Microsensors
Microactuators
Microelectronics Materials
Microelectromechanical CAD (MEMCAD)
Microfabrication Technology and its Application to Microsensors, Microactuators and Measurement of Mechanical Properties of Microelectronic Materials
Optical MEMS

Recent Work

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